microwave plasma device

基本解释

In this study, the microwave plasma device is designed to excite and maintain stable plasma on atmospheric press.
本研究设计了一套微波等离子体反应器，在大气压下激发并维持稳定的等离子体。
A microwave plasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.
本发明提供能够在处理基体上形成均匀的薄膜的微波等离子体处理装置和气体供给构件。
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The linearly coaxially coupled microwave plasma CVD device is a new microwave plasma CVD device bringing an axial extended plasma cylinder through a microwave antenna.
线形同轴耦合式微波等离子体CVD装置是一种利用微波天线产生轴向分布的等离子体柱的新型微波等离子体CVD装置。